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More-than-Moore Microacoustics: A Scalable Fabrication Process for Suspended Lamb Wave Resonators.

Marco LiffredoFederico PerettiNan XuSilvan StettlerLuis Guillermo Villanueva
Published in: CoRR (2024)
Keyphrases
  • process model
  • data sets
  • databases
  • artificial intelligence
  • e learning
  • multiscale
  • computational complexity
  • control system