Nondestructive Evaluation of MEMS Devices by Laser Confocal Measurements.

Xiao-Ming Wu Ning-xin Zhang Tianling Ren Litian Liu

Published in: ICMENS (2005)

Keyphrases

evaluation method
mobile devices
case study
evaluation process
real time
genetic algorithm
sensor data
power consumption
embedded systems
evaluation criteria
evaluation model
particle image velocimetry