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Development of an e-Diagnostics/Maintenance framework for semiconductor factories with security considerations.
Min-Hsiung Hung
Kuan-Yii Chen
Rui-Wen Ho
Fan-Tien Cheng
Published in:
Adv. Eng. Informatics (2003)
Keyphrases
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design principles
main contribution
case study
expert systems
learning algorithm
mobile devices
probabilistic model
knowledge acquisition
intrusion detection
information processing
software maintenance
legacy systems
semiconductor manufacturing