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Fabrication of embossed capacitive micromachined ultrasonic transducers using sacrificial release process.

Yuanyu YuJiujiang WangSio-Hang PunChing-Hsiang ChengKin Fong LeiMang I VaiShuang ZhangPeng Un Mak
Published in: IEICE Electron. Express (2019)
Keyphrases
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  • process model
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  • case study
  • image segmentation
  • high speed