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Dispatching rule considering time-constraints on processes for semiconductor wafer fabrication facility.

L. LiY. F. LiZ. J. Sun
Published in: CASE (2012)
Keyphrases
  • wafer fabrication
  • dispatching rule
  • particle swarm optimization
  • computer vision
  • special case
  • constraint satisfaction
  • genetic algorithm
  • case study
  • cost function
  • optimization problems