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Tracking Control of the Z-Tilts Error Compensation Stage of the Nano-measuring Machine Using Capacitor Insertion Method.
Van-Tsai Liu
Chien-Hung Liu
Tsai-Yuan Chen
Chun-Liang Lin
Yu-Chen Lin
Published in:
ICIC (1) (2007)
Keyphrases
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error compensation
real time
dynamic programming
optimization algorithm