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Monolithic integrable capacitive humidity sensing method for material characterization of dielectric thin films.

Andreas RückerlSophia HuppmannRoland ZeiselSimeon Katz
Published in: Microelectron. Reliab. (2014)
Keyphrases
  • thin film
  • objective function
  • detection method
  • databases
  • significant improvement
  • database systems
  • data streams
  • support vector machine
  • lighting conditions