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Monolithic integrable capacitive humidity sensing method for material characterization of dielectric thin films.
Andreas Rückerl
Sophia Huppmann
Roland Zeisel
Simeon Katz
Published in:
Microelectron. Reliab. (2014)
Keyphrases
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thin film
objective function
detection method
databases
significant improvement
database systems
data streams
support vector machine
lighting conditions