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A Lateral Differential Resonant Pressure Microsensor Based on SOI-Glass Wafer-Level Vacuum Packaging.
Bo Xie
Yonghao Xing
Yanshuang Wang
Jian Chen
Deyong Chen
Junbo Wang
Published in:
Sensors (2015)
Keyphrases
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information retrieval
neural network
image processing
levels of abstraction
semiconductor manufacturing
social networks
information systems
lower level
massively parallel