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Acceleration sensor using SOI wafer with honeycomb insulator.

Yoshikazu MiyagawaKensuke KandaTakayuki FujitaKazusuke MaenakaTokuji YokomatsuHaruka TakeuchiKohei Higuchi
Published in: SMC (2012)
Keyphrases
  • sensor networks
  • sensor data
  • integrated circuit
  • contact force
  • real time
  • multi sensor
  • massively parallel
  • data acquisition
  • fiber bragg grating
  • semiconductor manufacturing
  • monitoring system
  • sensor technology