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A MEMS-based flow sensor with membrane cantilever beam array structure.

Bian TianHuafeng LiNing YangHanyue LiuYulong Zhao
Published in: NEMS (2017)
Keyphrases
  • real time
  • sensor data
  • network structure
  • learning algorithm
  • artificial intelligence
  • search engine
  • multiscale
  • data structure
  • sensor networks
  • tree structure
  • structural information
  • graph structure
  • complex structures