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Programmable thermal processing module for semiconductor substrates.

Khalid El-AwadyCharles D. SchaperThomas Kailath
Published in: IEEE Trans. Control. Syst. Technol. (2004)
Keyphrases
  • room temperature
  • real time
  • low cost
  • data processing
  • information processing
  • learning algorithm
  • general purpose
  • infrared
  • computational power
  • databases
  • real world
  • information systems