Photomask pattern data processing system of bit-map method.
Hideki KoideChoi KimKatsufusa ShonoPublished in: Systems and Computers in Japan (1986)
Keyphrases
- data processing
- detection method
- objective function
- cost function
- clustering method
- optimization method
- support vector
- computational complexity
- pattern matching
- significant improvement
- synthetic data
- computational cost
- high precision
- classification method
- support vector machine svm
- support vector machine
- knn
- databases
- experimental evaluation
- evolutionary algorithm
- bayesian networks
- genetic algorithm
- data mining