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Optimally Scheduling Dual-Arm Multi-Cluster Tools to Process Two Wafer Types.

Qinghua ZhuGengHong WangYan HouNaiqi WuYan Qiao
Published in: IEEE Robotics Autom. Lett. (2022)
Keyphrases
  • user friendly
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  • artificial intelligence
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  • np hard
  • data points
  • scheduling problem
  • cluster analysis