Machine qualification management for a semiconductor back-end facility.
Mengying FuMoeed HaghnevisRonald G. AskinJohn W. FowlerMuhong ZhangPublished in: WSC (2010)
Keyphrases
- back end
- data management
- wafer fabrication
- user friendly
- data types
- information management
- data processing
- building blocks
- data repositories
- information systems
- detailed design
- database management systems
- version control
- decision support
- management system
- database systems
- neural network
- open source
- data points
- np hard
- network management
- batch processing
- semiconductor manufacturing
- case study
- decision making
- artificial intelligence