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Modeling and Analysis of a New Cylindrical Magnetic Levitation Gravity Compensator With Low Stiffness for the 6-DOF Fine Stage.

He ZhangBaoquan KouYinxi JinHailin Zhang
Published in: IEEE Trans. Ind. Electron. (2015)
Keyphrases
  • data analysis
  • image analysis
  • computational intelligence
  • neural network
  • learning algorithm
  • fuzzy sets
  • finite element analysis
  • mathematical modeling