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Evaluation for diaphragm's deflection for touch mode MEMS pressure sensors.
Yadollah Hezarjaribi
Mohd Hamidon
Roslina Mohd Sidek
Keshmiri Hossein
Raja Abdullah
Alireza Bahadorimehr
Published in:
Int. Arab J. Inf. Technol. (2011)
Keyphrases
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artificial intelligence
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multi sensor
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