Electrical impedance tomography based sensors for semiconductor manufacturing.

Michiel Krüger Kameshwar Poolla Costas J. Spanos

Published in: ACC (2002)

Keyphrases

semiconductor manufacturing
transmission line
discrete event simulation
process control
image reconstruction
sensor networks
data fusion
production system
real time
power system
sensor data
power grid
power distribution
electrical energy
electrical power
high speed
dynamic programming
image sequences