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Estimating relative deposition rates in a multi-source continuous-deposition process using a single composition sensor.
Matthew J. Hilt
Tyrone L. Vincent
Bharat S. Joshi
Lin J. Simpson
Published in:
IEEE Trans. Control. Syst. Technol. (2006)
Keyphrases
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multi source
single source
data fusion
genetic algorithm
information fusion
thin film
database
artificial intelligence
evolutionary algorithm
data management
multiple sources
soft clustering