On the fidelity of the ax+b equipment model for clustered photolithography scanners in fab-level simulation.

James R. Morrison

Published in: WSC (2011)

Keyphrases

mathematical model
formal model
queuing network
computational model
analytical model
probabilistic model
experimental data
conceptual model
simulation data
monte carlo simulation
mathematical models
manufacturing systems
simulation study
high level
visual quality
statistical model
cost function
bayesian networks