Scheduling of multiple in-line steppers for semiconductor wafer fabs.

Chie-Wun Chiou Muh-Cherng Wu

Published in: Int. J. Syst. Sci. (2014)

Keyphrases

wafer fabrication
semiconductor manufacturing
scheduling problem
machine learning
round robin
database
data sets
neural network
resource allocation
line segments
scheduling algorithm
parallel machines
production line