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Scheduling of multiple in-line steppers for semiconductor wafer fabs.
Chie-Wun Chiou
Muh-Cherng Wu
Published in:
Int. J. Syst. Sci. (2014)
Keyphrases
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wafer fabrication
semiconductor manufacturing
scheduling problem
machine learning
round robin
database
data sets
neural network
resource allocation
line segments
scheduling algorithm
parallel machines
production line