Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications.
Guoqiang WuJinghui XuXiaolin ZhangNan WangDanlei YanJayce Lay Keng LimYao ZhuWei LiYuandong GuPublished in: IEEE Trans. Ind. Electron. (2018)