• search
    search
  • reviewers
    reviewers
  • feeds
    feeds
  • assignments
    assignments
  • settings
  • logout

Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications.

Guoqiang WuJinghui XuXiaolin ZhangNan WangDanlei YanJayce Lay Keng LimYao ZhuWei LiYuandong Gu
Published in: IEEE Trans. Ind. Electron. (2018)
Keyphrases
  • high speed
  • levels of abstraction
  • massively parallel
  • coarse grained
  • fine grained
  • computer conferencing
  • learning environment
  • higher level
  • differential equations
  • high reliability
  • semiconductor manufacturing