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Application of micro-Raman spectroscopy for the evaluation of doping profile in Zn delta-doped GaAs structures.
R. Srnánek
G. Irmer
D. Donoval
J. Osvald
D. Mc Phail
A. Christoffi
B. Sciana
D. Radziewicz
M. Tlaczala
Published in:
Microelectron. J. (2008)
Keyphrases
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