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Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer.
Aldo Ghisi
Stefano Mariani
Alberto Corigliano
Sarah Zerbini
Published in:
Sensors (2012)
Keyphrases
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reduced order
kalman filtering
random access memory
kalman filter
filtering scheme
nonlinear systems
multi sensor
design considerations