Quick Wafer Alignment Using Feedforward Neural Networks.
HyungTae KimKangWon LeeBongKeon JeonChangSeop SongPublished in: IEEE Trans Autom. Sci. Eng. (2010)
Keyphrases
- feedforward neural networks
- neural network
- recurrent neural networks
- error function
- back propagation
- extreme learning machine
- hidden layer
- multilayer perceptron
- hidden neurons
- training algorithm
- multi layer perceptron
- backpropagation algorithm
- activation function
- radial basis function
- differential evolution
- artificial neural networks
- pattern recognition