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Survey on Run-to-Run Control Algorithms in High-Mix Semiconductor Manufacturing Processes.

Fei TanTianhong PanZhengming LiShan Chen
Published in: IEEE Trans. Ind. Informatics (2015)
Keyphrases
  • manufacturing processes
  • run times
  • decision making
  • real time
  • artificial intelligence
  • domain knowledge
  • manufacturing systems
  • machine learning
  • learning algorithm
  • mathematical models