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Sensitivity Enhancement of Silicon-on-Insulator CMOS MEMS Thermal Hot-Film Flow Sensors by Minimizing Membrane Conductive Heat Losses.
Zahid Mehmood
Ibraheem Haneef
Syed Zeeshan Ali
Florin Udrea
Published in:
Sensors (2019)
Keyphrases
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silicon on insulator
thermal conductivity
heat transfer
infrared
cmos technology
focal plane
ibm power processor
image processing
real time
image enhancement
sensor networks
general purpose
room temperature
power consumption
analog to digital converter