An improved method to remove anti-footing Al layer after DRIE.
Yuan LiZhenchuan YangGuizhen YanPublished in: NEMS (2009)
Keyphrases
- high precision
- synthetic data
- high accuracy
- cost function
- computational cost
- evaluation method
- classification method
- experimental study
- support vector machine svm
- similarity measure
- experimental evaluation
- main contribution
- classification accuracy
- probabilistic model
- dynamic programming
- significant improvement
- neural network
- data sets
- prior knowledge
- pairwise
- multiscale
- face recognition
- decision trees
- computer vision
- segmentation method
- matching algorithm
- genetic algorithm
- machine learning
- fully automatic