Lithography Hotspots Detection Using Deep Learning.

Vadim Borisov Jürgen Scheible

Published in: SMACD (2018)

Keyphrases

deep learning
unsupervised learning
object detection
machine learning
unsupervised feature learning
data sets
decision making
information retrieval
information extraction
text mining
decision makers
model selection
wordnet
multiple images
restricted boltzmann machine