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Study on compatible CMOS-MEMS process with surface micromachining for the application of monolithic integration.

Danqi ZhaoXian HuangJun HeLi ZhangPeng LiuFang YangDacheng Zhang
Published in: NEMS (2014)
Keyphrases
  • empirical studies
  • three dimensional
  • data integration
  • database
  • real time
  • computer vision
  • image processing
  • statistical analysis
  • process model
  • application specific