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Design of experiment evaluation of sputtered thin film platinum surface metallization on alumina substrate for implantable conductive structures.

Patrick KielePaul CvancaraMatthias MüllerThomas Stieglitz
Published in: EMBC (2017)
Keyphrases
  • thin film
  • d objects
  • film thickness
  • neural network
  • three dimensional
  • low cost
  • white light interferometry