Litho-Aware Machine Learning for Hotspot Detection.
Jea Woo ParkAndres TorresXiaoyu SongPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2018)
Keyphrases
- machine learning
- automatic detection
- detection method
- pattern recognition
- detection accuracy
- machine learning methods
- false alarms
- active learning
- machine learning algorithms
- artificial intelligence
- data mining
- detection algorithm
- anomaly detection
- text classification
- database
- false positives
- detection scheme
- information extraction
- computer science
- machine learning approaches
- case study
- decision trees
- feature selection
- detection rate
- learning problems
- explanation based learning
- machine learning and data mining
- computational intelligence
- kernel methods
- change detection
- knowledge acquisition
- text mining
- natural language processing
- knowledge discovery
- expert systems
- object recognition
- multiscale
- information systems
- databases