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Efficient Scattering Analysis of Arbitrarily Shaped Local Defect in Diffraction Grating.
Jun-ichiro Sugisaka
Takashi Yasui
Koichi Hirayama
Published in:
IEICE Trans. Electron. (2016)
Keyphrases
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arbitrarily shaped
signal processing
image segmentation
image analysis
x ray
similarity measure
data analysis
illumination correction