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Similarity Searching for Defective Wafer Bin Maps in Semiconductor Manufacturing.
Chung-Shou Liao
Tsung-Jung Hsieh
Yu-Syuan Huang
Chen-Fu Chien
Published in:
IEEE Trans Autom. Sci. Eng. (2014)
Keyphrases
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semiconductor manufacturing
similarity searching
similarity search
discrete event simulation
metric space
process control
production system
access methods
chemical structures
search tools
similarity queries
virtual screening
multimedia databases
neural network
vector space
multi dimensional
knn
feature space