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A Resonant Differential Pressure Microsensor With a Stress Isolation Layer.

Yadong LiChao ChengYulan LuJian ChenJunbo WangDeyong Chen
Published in: NEMS (2021)
Keyphrases
  • multi layer
  • frequency band
  • application layer
  • shear stress
  • expert systems
  • data sets
  • databases
  • genetic algorithm
  • artificial intelligence
  • environmental factors