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Vibration Mode of MEMS Ultrasonic Sensors on Buckled Diaphragms with Piezoelectric Resonance Frequency Modification.

Kaoru YamashitaHikaru HibinoTomoki NishiokaMinoru NodaPaul Muralt
Published in: IEEE SENSORS (2019)
Keyphrases
  • sensor data
  • real time
  • data fusion
  • sensor networks
  • artificial intelligence
  • multi sensor
  • sensor readings
  • low frequency
  • sensor fusion
  • frequency distribution
  • mixed mode
  • database
  • imaging sensors