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Design and Nanomotion Control of a Noncontact Stage with Squeeze Bearings.
Hayato Yoshioka
Toshimichi Gokan
Hidenori Shinno
Published in:
Int. J. Autom. Technol. (2008)
Keyphrases
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design process
user interface
control system
controller design
website
real time control
control unit
initial stages
data mining
image sequences
design principles
optimal design
numerical solution
mechanical systems