Frequency domain position estimation for lithographic alignment.
Alan GathererTeresa H.-Y. MengPublished in: ICASSP (3) (1993)
Keyphrases
- frequency domain
- position estimation
- autonomous navigation
- spatial domain
- parameter estimation
- fourier transform
- position and orientation
- feature extraction
- denoising
- mobile robot
- image alignment
- subband
- power spectra
- digital elevation models
- image matching
- multispectral
- model selection
- markov random field
- high quality