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Uncertainty Analysis Method Including Influence of Probe Alignment on On-Wafer Calibration Process.
Ryo Sakamaki
Masahiro Horibe
Published in:
IEEE Trans. Instrum. Meas. (2019)
Keyphrases
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detection method
high precision
experimental evaluation
high accuracy
control system
computational cost
recognition process
process control
neural network
genetic algorithm
data analysis
pairwise
dynamic programming
probabilistic model
support vector machine svm
optimization method