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Constrained Iterative Feedback Tuning for Robust Control of a Wafer Stage System.
Marcel François Heertjes
Bart Van der Velden
Tom Oomen
Published in:
IEEE Trans. Control. Syst. Technol. (2016)
Keyphrases
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feedback loop
parameter tuning
database
control system
relevance feedback
control strategy
control theory
data sets
reinforcement learning
computationally efficient
integrated circuit
visual feedback
semiconductor manufacturing
feedback loops