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In-Plane Resonant Nano-Electro-Mechanical Sensors: A Comprehensive Study on Design, Fabrication and Characterization Challenges.
Faezeh Arab Hassani
Yoshishige Tsuchiya
Hiroshi Mizuta
Published in:
Sensors (2013)
Keyphrases
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case study
electro mechanical
three dimensional
user interface
high speed
design process
frequency band