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Adaptive Neuro-Fuzzy Inference System Modeling of MRR and WIWNU in CMP Process With Sparse Experimental Data.

Lih Wen-ChenSatish T. S. BukkapatnamPrahalad K. RaoNaga ChandrasekharanRanga Komanduri
Published in: IEEE Trans Autom. Sci. Eng. (2008)
Keyphrases
  • experimental data
  • dynamic model
  • anfis model
  • upper bound
  • design process
  • sparse data
  • physical models