Sign in

Investigation on LIGA-like process based on multilevel imprint lithography.

Quandai WangYugang DuanYucheng DingBingheng LuJiawei XiangLianfa Yang
Published in: Microelectron. J. (2009)
Keyphrases
  • neural network
  • search engine
  • real time
  • databases
  • web services
  • decision trees
  • training data
  • cooperative
  • management system