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Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer.

Xin XiongChenguang YinLue QuanRyo SatoHiraku MatsukumaYuki ShimizuHideaki TamiyaWei Gao
Published in: Sensors (2022)
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