Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer.
Xin XiongChenguang YinLue QuanRyo SatoHiraku MatsukumaYuki ShimizuHideaki TamiyaWei GaoPublished in: Sensors (2022)