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Real-Time Control of Photoresist Extinction Coefficient Uniformity in the Microlithography Process.

Arthur TayWeng Khuen HoXiaodong Wu
Published in: IEEE Trans. Control. Syst. Technol. (2007)
Keyphrases
  • real time control
  • real time
  • flexible manufacturing systems
  • artificial intelligence
  • artificial neural networks
  • neural network
  • information systems
  • case study
  • process control
  • strong robustness