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Real-Time Control of Photoresist Extinction Coefficient Uniformity in the Microlithography Process.
Arthur Tay
Weng Khuen Ho
Xiaodong Wu
Published in:
IEEE Trans. Control. Syst. Technol. (2007)
Keyphrases
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real time control
real time
flexible manufacturing systems
artificial intelligence
artificial neural networks
neural network
information systems
case study
process control
strong robustness