A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity-Density Sensors.
Víctor Ruiz-DíezJavier ToledoJorge Hernando-GarcíaAbdallah AbabnehHelmut SeidelJose Luis Sanchez-RojasPublished in: Sensors (2019)