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Study on a Novel Peeling of Nano-Particle (PNP) Process for Localized Material Removal on a 4H-SiC Surface by Controllable Magnetic Field.

Thitipat PermpatdechakulPanart KhajornrungruangKeisuke SuzukiShotaro Kutomi
Published in: Int. J. Autom. Technol. (2023)
Keyphrases
  • magnetic field
  • special case
  • real time
  • process model
  • surface reconstruction
  • working principle