Constrained optimization of rotating magnetron in low-pressure plasma sputtering.
Sergey BelikovPublished in: ACC (2013)
Keyphrases
- constrained optimization
- high energy
- constrained optimization problems
- penalty function
- objective function
- constraint handling
- magnetic field
- unconstrained optimization
- augmented lagrangian
- inequality constraints
- penalty functions
- semi parametric
- closed form solutions
- evolutionary strategy
- lagrange multipliers
- iterative methods
- interval analysis