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Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints.
Yan Qiao
ChunRong Pan
Naiqi Wu
MengChu Zhou
Published in:
IEEE Trans Autom. Sci. Eng. (2015)
Keyphrases
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end users
process control
genetic algorithm
search engine
control system
software engineering
process model
hierarchical structure
software tools