Distributed-based Hierarchical Clustering System for Large-scale Semiconductor Wafers.
Seungchul LeeDaeyoung KimPublished in: IEEM (2018)
Keyphrases
- hierarchical clustering
- semiconductor manufacturing
- clustering method
- clustering algorithm
- model based clustering
- distributed systems
- incremental clustering
- text clustering
- agglomerative hierarchical clustering
- hierarchical clustering algorithm
- single link
- data sets
- partitional clustering
- hierarchical clustering methods
- integrated circuit
- correlation clustering
- hierarchical clustering algorithms