Parallel Simulation of Coupled Oxidation and Diffusion in VLSI Wafer-Fabrication.

Matthias G. Hackenberg Wolfgang Joppich Slobodan Mijalkovic

Published in: PARCO (1997)

Keyphrases

wafer fabrication
processor array
simulation model
parallel processing
queuing systems
asynchronous cellular automata
simulation study
anisotropic diffusion
shared memory
parallel computing
navier stokes equations
image processing
evolutionary algorithm
high speed
massively parallel
diffusion model